Rapid isothermal processing for fabrication of GaAs-based electronic devices (HBTs).
| Autor: | Pearton, S.J., Ren, F., Katz, A., Fullowan, T.R., Abernathy, C.R., Hobson, W.S., Kopf, R.F. |
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| Zdroj: | IEEE Transactions on Electron Devices; 1992, Vol. 39 Issue 1, p154-159, 6p |
| Databáze: | Complementary Index |
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