Enhancement of lithographic patterns by using serif features.
| Autor: | Fu, C.-C., Yang, T., Stone, D.R. |
|---|---|
| Zdroj: | IEEE Transactions on Electron Devices; 1991, Vol. 38 Issue 12, p2599-2603, 5p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Fu, C.-C., Yang, T., Stone, D.R. |
|---|---|
| Zdroj: | IEEE Transactions on Electron Devices; 1991, Vol. 38 Issue 12, p2599-2603, 5p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|