High reliability metal insulator metal capacitors for silicon germanium analog applications.

Autor: Stein, K., Kocis, J., Hueckel, G., Eld, E., Bartush, T., Groves, R., Greco, N., Harame, D., Tewksbury, T.
Zdroj: Proceedings of the 1997 Bipolar/BiCMOS Circuits & Technology Meeting; 1997, p191-194, 4p
Databáze: Complementary Index