Water in interlevel dielectrics: detection and effect on the performance of the MOS IC.
| Autor: | Lifshitz, N., Smolinsky, G. |
|---|---|
| Zdroj: | Proceedings, 39th Electronic Components Conference; 1989, p320-324, 5p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Lifshitz, N., Smolinsky, G. |
|---|---|
| Zdroj: | Proceedings, 39th Electronic Components Conference; 1989, p320-324, 5p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|