Material development of SIMOX with a thin box.
| Autor: | Sadana, D.K., Hovel, H.J., Freeouf, J.L., Chu, S.F., McFarland, P.A., Guerra, M. |
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| Zdroj: | Proceedings of 1993 IEEE International SOI Conference; 1993, p16-17, 2p |
| Databáze: | Complementary Index |
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