Highly uniform InGaAsP/InP growth in a multiwafer rotating disk reactor by MOCVD.
| Autor: | McKee, M.A., Yoo, B.-S., Stall, R.A. |
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| Zdroj: | LEOS 1992 Summer Topical Meeting Digest on Broadband Analog & Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics & Smart Pixels; 1992, p151-154, 4p |
| Databáze: | Complementary Index |
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