Low thermal budget antimony/phosphorus NMOS technology for CMOS.
| Autor: | Harame, D.L., Ganin, E., Comfort, J.H., Sun, J.Y.-C., Acovic, A., Cohen, S.A., Ronsheim, P.A., Verdonckt-Vandebroek, S., Restle, P.J., Ratanaphanyarat, S., Saccamango, M.J., Johnson, J.B., Furkay, S.A. |
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| Zdroj: | International Electron Devices Meeting 1991 Technical Digest; 1991, p645-648, 4p |
| Databáze: | Complementary Index |
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