The effects of minute impurities (H, OH, F) on the SiO/sub 2//Si interface investigated by nuclear resonant reaction and electron spin resonance.
| Autor: | Ohji, Y., Nishioka, Y., Yokogawa, K., Mukai, K., Qiu, Q., Arai, E., Sugano, T. |
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| Zdroj: | 27th Annual Proceedings, International Reliability Physics Symposium; 1989, p82-87, 6p |
| Databáze: | Complementary Index |
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