Blanket and Selective Copper CVD from Cu (Fod)2 For Multilevel Metallization.
| Autor: | Kaloyeros, Alain E., Saxena, Arjun N., Brooks, Kenneth, Ghosh, Sumanta, Eisenbraun, Eric |
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| Zdroj: | MRS Online Proceedings Library; 01/02/1990, Vol. 181, pN.PAG-1, 1p |
| Databáze: | Complementary Index |
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