Quantification of Hydrogen and Determination of the Binding State in a-Si:H:D by Thermal Desorption Spectroscopy.

Autor: Yabumoto, Norikuni, Muramatsu, Yasuji, Oshima, Masaharu
Zdroj: MRS Online Proceedings Library; 01/09/1986, Vol. 75, pN.PAG-1, 1p
Databáze: Complementary Index