Conversion of single crystal Si(100) to SiC film by C2H2.
| Autor: | Chiu, Chien C., Desu, Seshu B. |
|---|---|
| Zdroj: | Journal of Materials Research; 03/01/1993, Vol. 8 Issue 3, p535-544, 10p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Chiu, Chien C., Desu, Seshu B. |
|---|---|
| Zdroj: | Journal of Materials Research; 03/01/1993, Vol. 8 Issue 3, p535-544, 10p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|
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