Improved LOCOS isolation for thin-film SOI MOSFETs.
| Autor: | Colinge, J.P., Crahay, A., De Ceuster, D., Dessard, V., Gentinne, B. |
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| Zdroj: | Electronics Letters (Institution of Engineering & Technology); 09/12/1996, Vol. 32 Issue 19, p1834-1835, 2p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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