Qualification and Applications of a Piezoelectric MEMS Process.
| Autor: | Poppe, E., Ostbo, N.P., Booij, W., Tyholdt, F., Calame, F., Hok, B., Jensen, F., Raeder, H., Muralt, P. |
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| Zdroj: | TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators & Microsystems Conference; 2007, p529-532, 4p |
| Databáze: | Complementary Index |
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