A New Method for High-Rate Deep Dry Etching of Silicate Glass with Variable ETCH Profile.
| Autor: | Bertz, A., Fendler, R., Schuberth, R., Hentsch, W., Gessner, T. |
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| Zdroj: | TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators & Microsystems Conference; 2007, p81-84, 4p |
| Databáze: | Complementary Index |
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