Parallel-beams/lever electrothermal out-of-plane actuator.
| Autor: | Deladi, S., Krijnen, G., Elwenspoek, M.C. |
|---|---|
| Zdroj: | Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS 2003; 2003, p103-107, 5p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|
| Autor: | Deladi, S., Krijnen, G., Elwenspoek, M.C. |
|---|---|
| Zdroj: | Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS 2003; 2003, p103-107, 5p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|