A new paradigm of using TEM in yield enhancement failure analysis for sub-micron integrated circuit devices.
| Autor: | Oh, C.K., Song, Z.G., Neo, S.P., Ang, G.B., Magdeliza, G., Redkar, S. |
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| Zdroj: | ICONIP '02. Proceedings of the 9th International Conference on Neural Information Processing. Computational Intelligence for the E-Age (IEEE Cat. No.02EX575); 2002, p22-26, 5p |
| Databáze: | Complementary Index |
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