The extraction of development parameters by using cross-sectional critical shape error method.
| Autor: | Hyoung-Hee Kim, Jun-Tack Park, Jung-Wook Choi, Insin An, Hye-Keun Oh |
|---|---|
| Zdroj: | 2003 International Microprocesses & Nanotechnology Conference Digest of Papers Microprocesses & Nanotechnology 2003; 2003, p84-84, 1p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|