Design of a four-arm structure MEMS gripper integrated with sidewall force sensor.
| Autor: | Tao Chen, Liguo Chen, Baixu Liu, Jiachou Wang, Xinxin Li |
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| Zdroj: | 2009 4th IEEE International Conference on Nano/Micro Engineered & Molecular Systems; 2009, p75-79, 5p |
| Databáze: | Complementary Index |
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