Thin Film Formations of Ferroelectric Material Bi3Nd1Ti3O12 (BNT), High-k Materials SrTiO3 (STO) and Nb-doped SrTiO3(Nb-STO) by Newly Developed MOCVD System.
| Autor: | Toda, M., Sasaki, Y., Kurihashi, Y., Umeda, M., Fukagawa, M., Tamura, M., Kosugi, Y., Kusuhara, M. |
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| Zdroj: | 2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics; 2007, p142-145, 4p |
| Databáze: | Complementary Index |
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