A Study of High Sensitive Diaphragm for Silicon Microphone Applications.
| Autor: | Ray-Hua Horng, Zong-Ying Lin, Yu-Ning Jiang, Shang-Hua You, Shu-Zhen Zhun, Ru-Guan Wang, Shao-Chih Chang, Tsun-I Tsai, Chung-Chi Lai, Chi-Liang Chen |
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| Zdroj: | 2006 International Microsystems, Package, Assembly Conference Taiwan; 2006, p1-4, 4p |
| Databáze: | Complementary Index |
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