Implant charging dependence on photo resist bake and electron flood gun.
| Autor: | Romig, T., King Chao, Rendon, M.J., Azrack, M. |
|---|---|
| Zdroj: | 2000 International Conference on Ion Implantation Technology Proceedings Ion Implantation Technology - 2000 (Cat. No.00EX432); 2000, p558-560, 3p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|