Surface and bulk micromachined dual back-plate condenser microphone.
| Autor: | Martin, D.T., Kadirvel, K., Fox, R.M., Nishider, T., Liu, J., Sheplak, M. |
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| Zdroj: | 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005; 2005, p319-322, 4p |
| Databáze: | Complementary Index |
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