In-process parameter calibration of thermoelectrical flow sensors with monolithic integrated channel.

Autor: Kropp, M., Brauns, E., Sosna, C., Lang, W.
Zdroj: 2011 16th International Solid-State Sensors, Actuators & Microsystems Conference (TRANSDUCERS); 2011, p1064-1067, 4p
Databáze: Complementary Index