Reduction of nuisance rate in inspection using review/inspector cycle optimization methodology.
| Autor: | Chimin Chen, Yen Chuang, Che-Lun Hung, Tuung Luoh, Ling-Wu Yang, Tahone Yang, Kuang-Chao Chen, Chih-Yuan Lu |
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| Zdroj: | 2011 International Symposium on Semiconductor Manufacturing (ISSM) & e-Manufacturing & Design Collaboration Symposium (eMDC); 2011, p1-13, 13p |
| Databáze: | Complementary Index |
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