Characterization of dopant diffusion, mobility, activation and deactivation effects for n-type dopants with long-dwell laser spike annealing.
| Autor: | Shaoyin Chen, Yun Wang, Heidelberger, C., Thompson, M. |
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| Zdroj: | 2011 11th International Workshop on Junction Technology (IWJT); 2011, p128-131, 4p |
| Databáze: | Complementary Index |
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