Kinetics of silicon nitride formation by gas-phase routes in the Si–C–O–N system.
| Autor: | Ekelund, Magnus, Forslund, Bertil |
|---|---|
| Zdroj: | Journal of Materials Chemistry; Oct1992, Vol. 2 Issue 10, p1079-1086, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Ekelund, Magnus, Forslund, Bertil |
|---|---|
| Zdroj: | Journal of Materials Chemistry; Oct1992, Vol. 2 Issue 10, p1079-1086, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|