Increase of electrical activation and mobility of Si-doped GaAs, grown at low substrate temperatures, by the migration-enhanced epitaxy method.

Autor: Tadayon, Bijan, Tadayon, Saied, Spencer, M. G., Harris, G. L., Griffin, J., Eastman, L. F.
Předmět:
Zdroj: Journal of Applied Physics; 1/1/1990, Vol. 67 Issue 1, p589, 3p, 5 Graphs
Abstrakt: Provides information on a study which analyzed silicon-doped GaAs layers which were grown by the migration-enhanced epitaxy method and by the conventional molecular-beam epitaxy (MBE) method. Benefits from the growth at low T[subs]; Limitation in the use of the MBE method; Uses of the migration-enhanced epitaxy method.
Databáze: Complementary Index