Improved Si3N4/Si/GaAs metal-insulator-semiconductor interfaces by in situ anneal of the as-deposited Si.

Autor: Tao, Meng, Botchkarev, Andrei E., Park, Daegyu, Reed, John, Chey, S. Jay, Van Nostrand, Joseph E., Cahill, David G., Morkoç, Hadis
Předmět:
Zdroj: Journal of Applied Physics; 4/15/1995, Vol. 77 Issue 8, p4113, 3p, 1 Black and White Photograph, 1 Chart, 2 Graphs
Abstrakt: Provides information on a study that proposed the use of in situ anneal to solve the problem of incompatible growth temperature of silicon on GaAs metal-insulator-semiconductor structures. Experimental procedure; Results and discussion on the study.
Databáze: Complementary Index