| Autor: |
Anders, Simone, Anders, André, Brown, Ian |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 9/15/1993, Vol. 74 Issue 6, p4239, 3p |
| Abstrakt: |
Present a study which produced macroparticle-free films of various metals and diamond-like carbon by a pulsed vacuum arc deposition technique. Characteristics of the films; Comparison on the total efficiency of the combined gun-filter plasma source and a standard vacuum arc plasma source; Information on the ion saturation current; Details of the plasma guiding mechanism. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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