| Autor: |
Martin, P., Dufour, M., Ermolieff, A., Marthon, S., Pierre, F., Dupuy, M. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 10/1/1992, Vol. 72 Issue 7, p2907, 5p, 1 Black and White Photograph, 9 Graphs |
| Abstrakt: |
Presents a study which examined implantation-induced changes in quartz using cross-sectional transmission electron microscopy, Rutherford backscattering spectrometry (RBS) and x-ray photoelectron spectroscopy. Details of the experiment on implantations; Overview of the sheet resistance of titanium-implanted quartz; Result of the RBS for the implanted structure. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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