Silicon doped diamond-like carbon films as a coating for improvement of electron field emission.

Autor:	Evtukh, Anatoli A., Litovchenko, Volodimir G., Litvin, Yurii M., Fedin, Dmitrii V., Dzyan, Olexander S., Pedchenko, Yu. N., Chakhovskoi, Andrei G., Felter, Thomas E.
Zdroj:	Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2003, Vol. 21 Issue 1, p627-630, 4p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu