How to make polyvinylphenol inhibitable by diazonaphthoquinone sulfonates.
| Autor: | Yan, Zhenglin, Yeh, Tung-Feng, He, Xiaohua, Reiser, Arnost, Schadt, Frank L., Fincher, Curtis R. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2000, Vol. 18 Issue 6, p2745-2749, 5p |
| Databáze: | Complementary Index |
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