Roads to ultrathin silicon oxides.
| Autor: | Morgen, P., Bahari, A., Robenhagen, U., Andersen, J. F., Hansen, J.-K., Pedersen, K., Rao, M. G., Li, Z. S. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2005, Vol. 23 Issue 1, p201-207, 7p |
| Databáze: | Complementary Index |
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