High-density plasma patterning of low dielectric constant polymers: A comparison between polytetrafluoroethylene, parylene-N, and poly(arylene ether).
| Autor: | Standaert, T. E. F. M., Matsuo, P. J., Li, X., Oehrlein, G. S., Lu, T.-M., Gutmann, R., Rosenmayer, C. T., Bartz, J. W., Langan, J. G., Entley, W. R. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2001, Vol. 19 Issue 2, p435-446, 12p |
| Databáze: | Complementary Index |
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