A numerical simulation of the evolution of nanometer-scale surface topography generated by ion milling.
| Autor: | Winningham, Thomas A., Zou, Zhong, Douglas, Kenneth, Clark, Noel A. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1998, Vol. 16 Issue 3, p1178-1182, 5p |
| Databáze: | Complementary Index |
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