Interface formation between metals (Cu, Ti) and low dielectric constant organic polymer (FLARE™ 1.0).
| Autor: | Du, M., Opila, R. L., Case, Carlye |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1998, Vol. 16 Issue 1, p155-162, 8p |
| Databáze: | Complementary Index |
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