Continuous-wave laser doping of micrometer-sized features in gallium arsenide using a dimethylzinc ambient.
| Autor: | Licata, T. J., Podlesnik, D. V., Tang, H., Herman, I. P., Osgood, R. M., Schwarz, S. A. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1990, Vol. 8 Issue 3, p1618-1622, 5p |
| Databáze: | Complementary Index |
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