Dry pumps operating under harsh conditions in the semiconductor industry.
Autor: | Troup, A. P., Turrell, D. |
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Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1989, Vol. 7 Issue 3, p2381-2386, 6p |
Databáze: | Complementary Index |
Externí odkaz: |