Sample geometry effects in rapid thermal annealing.

Autor:	Ruggles, G. A., Hong, S. N., Wortman, J. J., Sorrell, F. Y., Ozturk, M. C.
Zdroj:	Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1990, Vol. 8 Issue 2, p122-127, 6p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu