Comparison of disilane and hydrogen adsorption on Si(111)-7×7.
| Autor: | Uram, K. J., Jansson, U. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1989, Vol. 7 Issue 5, p1176-1181, 6p |
| Databáze: | Complementary Index |
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