Traceable calibration of critical-dimension atomic force microscope linewidth measurements with nanometer uncertainty.

Autor:	Dixson, R. G., Allen, R. A., Guthrie, W. F., Cresswell, M. W.
Zdroj:	Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2005, Vol. 23 Issue 6, p3028-3032, 5p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu