Millisecond microwave annealing: Driving microelectronics nano.
| Autor: | Thompson, Keith, Booske, J. H., Ives, R. L., Lohr, J., Gorelov, Yurii, Kajiwara, Ken |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2005, Vol. 23 Issue 3, p970-978, 9p |
| Databáze: | Complementary Index |
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