Phase-shift/transmittance measurements in a micro pattern using MPM193EX.
| Autor: | Nozawa, Hiroto, Ishida, Takayuki, Kato, Satoru, Sato, Osamu, Miyazaki, Koji, Takehisa, Kiwamu, Awamura, Naoki, Takizawa, Hideo, Kusunose, Hal |
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| Zdroj: | Proceedings of SPIE; Nov2009, Issue 1, p737925-737925-10, 10p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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