SIM external metrology beam launcher (QP) development.

Autor: Ames, Lawrence L., Barrett, Robert, Bell Jr., Raymond M., Dries, Lawrence J., Dutta, Kalyan, Halverson, Peter G., Holmes, Buck, Kvamme, Eric T., Leary, David F., Perkins, Patrick, Scott, Mark, Van Eck, Timothy E., Zhao, Feng
Zdroj: Proceedings of SPIE; Nov2003, Issue 1, p347-354, 8p
Databáze: Complementary Index