Defect printability of hole pattern on electron projection lithography.
| Autor: | Yamamoto, Jiro, Tomo, Yoichi, Shimizu, Sumito, Iwasaki, Teruo, Yamabe, Masaki |
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| Zdroj: | Proceedings of SPIE; Nov2003, Issue 1, p972-982, 11p |
| Databáze: | Complementary Index |
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