Controlling line-edge rougness to within reasonable limits.
| Autor: | Cobb, Jonathan L., Rauf, Shahid, Thean, Aaron, Dakshina-Murthy, S., Stephens, Tab, Parker, Colita, Peters, Richard D., Rao, Vivek |
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| Zdroj: | Proceedings of SPIE; Nov2003, Issue 1, p376-383, 8p |
| Databáze: | Complementary Index |
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