New repair of clear defects on half-tone PSM using Ga implantation.
| Autor: | Nagamura, Yoshikazu, Kanai, Itaru, Tange, Koji, Hosono, Kunihiro, Hayashi, Koki, Ikeda, Hidehiro, Nagashige, Susumu, Ishijima, Mikio, Iwasaki, Hironobu, Kikuchi, Yasutaka |
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| Zdroj: | Proceedings of SPIE; Nov2003, Issue 1, p466-475, 10p |
| Databáze: | Complementary Index |
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