Alignment accuracy of LEEPL: image placement error correction.
| Autor: | Nohdo, Shinichiro, Motohashi, Tomonori, Shimazu, Nobuo, Nakano, Hiroyuki, Omori, Shinji, Kitagawa, Tetsuya, Moriya, Shigeru |
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| Zdroj: | Proceedings of SPIE; Nov2003, Issue 1, p871-878, 8p |
| Databáze: | Complementary Index |
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