SCALPEL proof-of-concept system: preliminary lithography results.
Autor: | Waskiewicz, Warren K., Biddick, Christopher J., Blakey, Myrtle I., Brady, Kevin J., Camarda, Ron M., Connelly, Wayne F., Crorken, A. H., Custy, J. P., DeMarco, R., Farrow, Reginald C., Felker, Joseph A., Fetter, Linus A., Freeman, Richard R., Harriott, Lloyd R., Hopkins, Leslie C., Huggins, Harold A., Kasica, Richard J., Knurek, Chester S., Kraus, Joseph S., Liddle, James A. |
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Zdroj: | Proceedings of SPIE; Nov1997, Issue 1, p255-263, 9p |
Databáze: | Complementary Index |
Externí odkaz: |