Design of pattern-specific mask grating for giving the effect of an off-axis illumination.
| Autor: | Kim, Young-Seok, Song, Seok Ho, Lee, Jong Ung, Oh, Sung Hyun, Choi, Yong Kyoo, Kim, Munsik, O, Beom-Hoan, Park, Se-Geun, Lee, El-Hang, Lee, Seung Gol |
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| Zdroj: | Proceedings of SPIE; Nov2008, Issue 1, p67920R-67920R-10, 10p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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